C&PE 655. Introduction to Semiconductor Processing. 3 Hours.

An overview of various processes to fabricate semiconductor devices and integrated circuits. Topics covered include crystal growth, oxidation, solid-state diffusion, ion implantation, photolithography, chemical vapor deposition, epitaxial growth, metalization, and plasma etching of thin films. (Same as EECS 670.) Prerequisite: Senior standing in CPE or EECS, or consent of instructor. LEC.

Bachelor of Science in Chemical Engineering


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